Product Details:
|
Material: | SiC | Composition:SiC: | >85% |
---|---|---|---|
Color: | Black | Density: | ≥3.65g/cm3 |
Max. Service Temp: | 1380℃ | Flexural Strength: | 250MPa |
Hardness: | ≥84HRA | Water Absorption: | ≤0.2% |
Abrasion: | < 0.02% | Bending Strength: | ≥290MPa |
Highlight: | High Purity Alumina Ceramic Ring,Alumina Ceramic Focus Ring,Alumina Ceramic Edge Ring |
Ceramic Ring, Collar Edge Ring , Focus Ring, Chamber Insert Moer Ring,liner,Dep Ring
Descrpition:Ring series
Material:High purity alumina(A998)
Features:
High plasma resistance
High dielectric strength
High corrosion resistance
Applications:200mm, 300mm semi equipment
Materials:
Contact Person: Ms. Yuki
Tel: 8615517781293