Silicon Carbide (sic) Trays Or Plate, As A Wafer Holder For Icp Etching Process In Led Industry

Description:

Silicon Carbide (SiC) Trays or plate used as a wafer holder for ICP etching process in LED industry.

Silicon carbide (SiC) is a has excellent thermal conductivity, corrosion resistance, and with low thermal expansion. Silicon carbide is an excellent material for sealing rings and bearings. Silicon carbide trays have excellent corrosion resistance, great wear resistance, great mechanical strength under high temperatures. We supply many sizes of silicon carbide trays as well as other SiC products.
 

Silicon Carbide Trays Properties: 

Silicon Carbide Tray Specifications: 

Feature requirement:

1. Excellent thermal conductivity
2. Resistant to plasma shock
3. Good temperature uniformity

Applications:
-Silicon carbide can be applied in areas such as semiconductor and coating.
-Our silicon carbide trays are widely used in LED industry.