High-Temperature Resistant SiC Forks with 1650°C Max Service Temp and 3800MPa Flexural Strength for Semiconductor Manufacturing
Basic Properties
Place of Origin:
China
Brand Name:
KEGU
Model Number:
Customizable
Trading Properties
Minimum Order Quantity:
Negotiable
Price:
Negotiable
Payment Terms:
L/C,D/A,D/P,T/T,Western Union,MoneyGram
Product Summary
High-Temperature Resistant SiC Forks Precision Core Components for Semiconductor Manufacturing High-Temperature Resistant Silicon Carbide (SiC) Forks, also known as Pressureless Sintered SiC Robotic Arms, represent a breakthrough in material science for precision automation. Engineered using ...
Product Details
Highlight:
Pressureless Sintered SIC Fork
,Lightweight Sintered SIC Fork
,High Temperature Resistant SIC Fork
Material:
SiC
Composition:SiC:
>98%
Color:
Black
Density:
>3.05g/cm3
Max. Service Temp:
1650°C
Flexural Strength:
3800MPa
Usage:
Industry Usage
Chemical Composition:
Al2O3, SiO2
Sic Content:
85%
Maximum Temperature:
1600℃
Characteristics:
High Wear Resistance
Thermal Expansion Coefficient:
4.0-4.5 × 10^-6 /K
Material Composition:
4%Si >96%Sic
Working Temperature:
1650
Advantage:
Wear And Abrasion Resistance
Purity:
98%
Material:
Silicon Carbide Ceramic
Acid Alkaline Proof:
Excellent
Solubility:
Insoluble
Open Porosity:
<0.1%
Flexural Strength:
350-550 MPa
Product Description
High-Temperature Resistant SiC Forks
Precision Core Components for Semiconductor Manufacturing
High-Temperature Resistant Silicon Carbide (SiC) Forks, also known as Pressureless Sintered SiC Robotic Arms, represent a breakthrough in material science for precision automation. Engineered using advanced pressureless sintering technology, these forks deliver unparalleled performance in the most demanding semiconductor manufacturing environments.
Key Properties & Advantages
- Extreme Temperature Resilience: Withstands operating temperatures up to 1650°C in air, maintaining structural integrity in high-temperature processes.
- Superior Mechanical Strength: Features high flexural strength (320-400 MPa) from room temperature up to 1300°C, ensuring reliable performance under heavy loads.
- Exceptional Thermal Management: Offers outstanding thermal conductivity (196 W/m*K at 20°C) combined with low thermal expansion (4.0 x 10⁻⁶/K), providing excellent thermal shock resistance (>350°C).
- Maximized Durability: Ultra-high hardness (2350 kg/mm² Vickers) and near-zero open porosity ensure exceptional wear resistance and long-term reliability in abrasive environments.
- Optimized for Precision: High modulus of elasticity (410 GPa) and rigid lightweight design enable minimal deflection and high-precision handling of sensitive substrates like silicon wafers.
Technical Specifications
| Physical Properties | Unit | Value (SSiC) |
|---|---|---|
| Composition: SiC | Vol% | ≥98 |
| Density @ 20 °C | g/cm³ | ≥3.05 |
| Open Porosity | Vol% | ≈0 |
| Vickers Hardness HV1 | kg/mm² | 2350 |
| Rockwell Hardness 45N | R45N | 93 |
| Flexural Strength @ 20°C | MPa | 320-400 |
| Flexural Strength @ 1300°C | MPa | 300-400 |
| Thermal Conductivity @ 20°C | W*m⁻¹*K⁻¹ | 196 |
| Thermal Conductivity @ 1200°C | W*m⁻¹*K⁻¹ | 60 |
| Max. Service Temp (air) | °C | 1650 |
| Thermal Shock Resistance | °C | >350 |
| Coefficient of Thermal Expansion | 10⁻⁶/K | 4.0 |
| Modulus of Elasticity @ RT | GPa | 410 |
Critical Application Areas
- Semiconductor Manufacturing: Ideal for wafer handling, transfer, and processing in CVD, LPCVD, diffusion furnaces, and other high-temperature equipment
- Advanced Thermal Processing: Essential components for high-temperature industrial furnaces and heat treatment systems
- Aerospace & Defense: Critical parts requiring thermal stability and lightweight durability
- Nuclear Energy Systems: Components for demanding radiation and high-temperature environments
- Precision Automation: Robotic arms and end-effectors for cleanroom and harsh environment applications
Performance Benefits
- Reduced particle generation and contamination in cleanroom environments
- Minimal thermal deformation for precise positioning accuracy
- Extended service life compared to quartz and graphite alternatives
- Reduced maintenance downtime and increased production throughput
- Excellent resistance to chemical corrosion from process gases and cleaning agents
These SiC forks are specifically engineered to enhance process reliability and yield in precision manufacturing applications where temperature extremes, chemical resistance, and mechanical stability are critical performance factors.
Miss. Scarlett.S
Deputy Head of Foreign Trade Department
- Email: scarlett.s@kegugroup.com
- Tel: 8616602956098
- WhatsApp: 8613390790728
-
WeChat:
Scarlettseren533
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