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High-Temperature Resistant SiC Forks with 1650°C Max Service Temp and 3800MPa Flexural Strength for Semiconductor Manufacturing

Silicon Carbide Ceramic
December 18, 2025
Category Connection: Silicon Carbide Ceramic
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#Silicon Carbide Ceramics #Pressureless Sintered SIC #SIC Ceramics
Brief: Stay tuned as we highlight the most important features and real-use results. In this video, we demonstrate the High-Temperature Resistant SiC Forks in action, showcasing their exceptional performance in semiconductor manufacturing. You'll see how these pressureless sintered SiC robotic arms withstand extreme temperatures up to 1650°C while maintaining precision handling of sensitive silicon wafers. We'll walk you through their superior thermal management and mechanical strength, explaining how they enhance process reliability and yield in demanding environments like CVD and diffusion furnaces.
Related Product Features:
  • Withstands operating temperatures up to 1650°C in air, maintaining structural integrity in high-temperature semiconductor processes.
  • Features high flexural strength of 320-400 MPa from room temperature up to 1300°C for reliable performance under heavy loads.
  • Offers outstanding thermal conductivity of 196 W/m*K at 20°C combined with low thermal expansion for excellent thermal shock resistance.
  • Provides ultra-high Vickers hardness of 2350 kg/mm² and near-zero open porosity for exceptional wear resistance and durability.
  • High modulus of elasticity of 410 GPa enables minimal deflection and high-precision handling of sensitive substrates like silicon wafers.
  • Reduces particle generation and contamination in cleanroom environments for enhanced process reliability.
  • Offers excellent resistance to chemical corrosion from process gases and cleaning agents.
  • Extended service life compared to quartz and graphite alternatives, reducing maintenance downtime.
Faqs:
  • What is the maximum operating temperature for these SiC forks?
    These High-Temperature Resistant SiC Forks can withstand operating temperatures up to 1650°C in air while maintaining structural integrity, making them ideal for high-temperature semiconductor manufacturing processes.
  • How do these SiC forks perform in terms of mechanical strength?
    The forks feature high flexural strength ranging from 320-400 MPa from room temperature up to 1300°C, ensuring reliable performance under heavy loads and maintaining precision in demanding automation applications.
  • What advantages do these SiC forks offer over traditional materials like quartz or graphite?
    Compared to quartz and graphite alternatives, these SiC forks provide extended service life, reduced maintenance downtime, superior thermal shock resistance (>350°C), ultra-high hardness (2350 kg/mm² Vickers), and minimal particle generation in cleanroom environments.
  • In which semiconductor manufacturing applications are these SiC forks typically used?
    These forks are ideal for wafer handling, transfer, and processing in CVD, LPCVD, diffusion furnaces, and other high-temperature equipment where temperature extremes, chemical resistance, and mechanical stability are critical.
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