Silicon Carbide (SiC) Furnace Components | Paddles, Boats & Tubes for Semiconductor & Solar

Product Description

Our Silicon Carbide (SiC) Furnace Components provide advanced ceramic solutions for demanding semiconductor and solar manufacturing processes. Engineered to withstand extreme temperatures up to 1900°C, these high-purity components deliver superior thermal shock resistance, exceptional mechanical strength, and contamination-free performance - offering significantly longer service life and higher throughput compared to traditional quartz alternatives.

Core Product Line & Applications

• SiC Paddle: Robust wafer boat holder for diffusion processes

• SiC Boat: Wafer carrier for boron/phosphorus diffusion in discrete semiconductor manufacturing

• SiC Dragon Wafer Boat: Specialized holder for high-temperature diffusion applications

• SiC Process Tube: Critical component for diffusion furnace systems

Key Technical Advantages

• Extreme Temperature Performance: Maintains structural integrity and chemical stability at 1900°C operating temperatures

• Superior Mechanical Properties: High flexural strength (up to 420 MPa) prevents deformation under heavy thermal loads

• Exceptional Thermal Management: Outstanding thermal shock resistance ensures reliability during rapid thermal cycling

• Ultra-High Purity Construction: Resists acid/alkali corrosion, preventing wafer contamination in sensitive processes

• Optimized Thermal Conductivity: Ensures uniform temperature distribution for consistent process results

Technical Performance Specifications

Primary Industrial Applications

• Semiconductor Manufacturing: Diffusion, CVD, and high-temperature processing

• LED Production: Epitaxial growth and wafer processing applications

• Solar Energy: Photovoltaic cell diffusion furnace systems

• Discrete Power Devices: Boron and phosphorus diffusion processes

Competitive Advantages

• Quality Assurance: Rigorous quality control ensures consistent performance across all batches

• Custom Engineering: Expertise in manufacturing components to precise customer specifications

• Reliable Delivery: Efficient production systems designed to meet critical project timelines

• Technical Support: Comprehensive application engineering and customer service