Advanced Alumina Ceramic Rings for Semiconductor Equipment

Product Description

We manufacture high-performance Alumina Ceramic Rings specifically engineered for critical applications in semiconductor plasma processing equipment. Made from High-Purity Alumina A998 (99.8%), our components provide unmatched plasma resistance and reliability in demanding etch and CVD chambers.

Product Overview

Our ceramic ring series includes, but is not limited to:

• Collar Edge Rings / Dep Rings

• Focus Rings

• Chamber Inserts & Liners

• Other Customized Process Kit Components

These components are precision-engineered to meet the stringent requirements of 200mm and 300mm semiconductor fabrication tools, ensuring process stability and yield.

Key Material Properties & Advantages

Primary Applications in Semiconductor Manufacturing

Our ceramic rings are vital consumables and components within plasma chambers:

• Etch Systems: Used as Focus Rings and Chamber Liners in Dielectric and Conductor Etch tools to precisely control plasma density and protect chamber walls.

• CVD/PVD Systems: Serve as Collar Edge Rings and Inserts to define the processing environment and prevent unwanted deposition.

• Plasma Cleaning Chambers: Act as durable Liners that resist erosion from O₂ or NF₃ plasmas, extending maintenance cycles.

Why Choose Our Alumina Ceramic Rings?

• Manufactured for Precision: We specialize in producing components with tight tolerances and superior surface finishes, ensuring a perfect fit and optimal plasma performance in your specific toolset.

• Designed for Performance: Our focus on material science and engineering results in parts that deliver longer service life, reduced particle counts, and improved process repeatability.

• Compatible with Major Platforms: Our products are designed for use in a wide range of 200mm and 300mm semiconductor equipment from leading OEMs.

Looking for a reliable partner for your semiconductor ceramic components? Contact us today for technical specifications, pricing, and to discuss custom solutions for your application.