High-Purity Alumina A998 (99.8%) Ceramic Rings for 200mm and 300mm Semiconductor Tools with Exceptional Plasma Resistance
Basic Properties
Place of Origin:
China
Brand Name:
KEGU
Model Number:
Customizable
Trading Properties
Price:
200-500 yuan/kg
Payment Terms:
L/C,D/A,D/P,T/T,Western Union,MoneyGram
Supply Ability:
2,000 pcs/month
Product Summary
Advanced Alumina Ceramic Rings for Semiconductor Equipment We manufacture high-performance Alumina Ceramic Rings specifically engineered for critical applications in semiconductor plasma processing equipment. Made from High-Purity Alumina A998 (99.8%), our components provide unmatched plasma ...
Product Details
Highlight:
High Purity Alumina Ceramic Ring
,Alumina Ceramic Focus Ring
,Alumina Ceramic Edge Ring
Material:
SiC
Composition:SiC:
＞85%
Color:
Black
Density:
≥3.65g/cm3
Max. Service Temp:
1380℃
Flexural Strength:
250MPa
Hardness:
≥84HRA
Water Absorption:
≤0.2%
Abrasion:
< 0.02%
Bending Strength:
≥290MPa
Product Description
Advanced Alumina Ceramic Rings for Semiconductor Equipment
We manufacture high-performance Alumina Ceramic Rings specifically engineered for critical applications in semiconductor plasma processing equipment. Made from High-Purity Alumina A998 (99.8%), our components provide unmatched plasma resistance and reliability in demanding etch and CVD chambers.
Product Overview
- Collar Edge Rings / Dep Rings
- Focus Rings
- Chamber Inserts & Liners
- Other Customized Process Kit Components
These components are precision-engineered to meet the stringent requirements of 200mm and 300mm semiconductor fabrication tools, ensuring process stability and yield.
Key Material Properties & Advantages
| Feature | Benefit for Your Process |
|---|---|
| Exceptional Plasma Resistance | Extends Service Life: Withstands aggressive plasma environments in etch and deposition chambers, reducing particle generation and frequency of replacement. |
| High Dielectric Strength | Superior Electrical Insulation: Prevents current leakage and arcing, ensuring process stability and protecting sensitive chamber components. |
| High Corrosion Resistance | Chemically Inert: Resists corrosion from halogen-based (e.g., CF₄, Cl₂) and other process gases, maintaining geometric integrity and process consistency. |
| High Purity (A998) | Minimizes Contamination: 99.8% alumina content ensures no metallic contamination, which is critical for high-purity wafer manufacturing and high yield rates. |
| Excellent Mechanical Strength | Durable and Reliable: Maintains structural integrity under thermal and mechanical stress, ensuring long-term performance and reducing unscheduled downtime. |
Primary Applications in Semiconductor Manufacturing
Our ceramic rings are vital consumables and components within plasma chambers:
- Etch Systems: Used as Focus Rings and Chamber Liners in Dielectric and Conductor Etch tools to precisely control plasma density and protect chamber walls.
- CVD/PVD Systems: Serve as Collar Edge Rings and Inserts to define the processing environment and prevent unwanted deposition.
- Plasma Cleaning Chambers: Act as durable Liners that resist erosion from O₂ or NF₃ plasmas, extending maintenance cycles.
Why Choose Our Alumina Ceramic Rings?
- Manufactured for Precision: We specialize in producing components with tight tolerances and superior surface finishes, ensuring a perfect fit and optimal plasma performance in your specific toolset.
- Designed for Performance: Our focus on material science and engineering results in parts that deliver longer service life, reduced particle counts, and improved process repeatability.
- Compatible with Major Platforms: Our products are designed for use in a wide range of 200mm and 300mm semiconductor equipment from leading OEMs.
Looking for a reliable partner for your semiconductor ceramic components? Contact us today for technical specifications, pricing, and to discuss custom solutions for your application.
Miss. Scarlett.S
Deputy Head of Foreign Trade Department
- Email: scarlett.s@kegugroup.com
- Tel: 8616602956098
- WhatsApp: 8613390790728
-
WeChat:
Scarlettseren533
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