High-Corrosion Resistance Silicon Carbide Ceramic Components for Semiconductor Applications in 200mm/300mm HDPCVD Domes

Name: High-Corrosion Resistance Silicon Carbide Ceramic Components for Semiconductor Applications in 200mm/300mm HDPCVD Domes
Brand: Shaanxi KeGu New Material Technology Co., Ltd
Availability: InStock

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Silicon Carbide Ceramic
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NGK values our long-standing partnership with Shaanxi Kegu. Their SSiC ceramics excel in quality and innovation, driving our mutual success. Here’s to continued collaboration!

—— NGK Thermal Technology Co.,Ltd

At Huike, we take pride in our long-standing partnership with Shaanxi Kegu New Material Technology Co., Ltd., a collaboration rooted in trust, innovation, and shared excellence.Their expertise in SSiC ceramics and reliable solutions have consistently supported our projects.

—— SuzhouHuike Technology Co.,Ltd

We at Keda greatly appreciate our long-standing partnership with Shaanxi Kegu New Material Technology Co., Ltd. Their high-quality SSiC ceramic solutions have been integral to our projects and we look forward to continued collaboration and shared success.

—— Keda Industrial Group Co.,Ltd.

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High-Corrosion Resistance Silicon Carbide Ceramic Components for Semiconductor Applications in 200mm/300mm HDPCVD Domes

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High-Corrosion Resistance Silicon Carbide Ceramic Components for Semiconductor Applications in 200mm/300mm HDPCVD Domes

Description

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High-Corrosion Resistance Silicon Carbide Ceramic Components

Semiconductor Applications HDPCVD Dome

200mm/300mm Configurations Industrial Ceramic Parts

High-Corrosion Resistance Industrial Ceramic Parts: HDPCVD Domes & Components

Advanced Ceramic Solutions for Demanding Semiconductor Applications
Our high-performance industrial ceramic components are engineered for extreme environments in semiconductor manufacturing, including HDPCVD (High-Density Plasma Chemical Vapor Deposition) processes. Available in multiple material options to meet specific thermal, mechanical, and corrosion resistance requirements.

HDPCVD Dome Products

Available Types & Specifications:

Standard HDP Dome: 200mm / 300mm configurations
SpeedDome: Optimized for high-throughput processes
DPS Dome: Enhanced plasma resistance designs
Custom Roughness: Inner contour surface finish from Ra 0.5 to Ra 5.3
Key Benefits: Prevents film shedding, minimizes particle contamination, compatible with various process requirements

Material Selection Guide

Property	Alumina (Al₂O₃)	Aluminum Nitride (AlN)	Zirconia (ZrO₂)	Silicon Carbide (SiC)	Sapphire (Single Crystal Al₂O₃)
Density (g/cm³)	3.9	3.3	6.0	3.21	3.97
Hardness (GPa)	14-17	10-12	13	27-28	22.5
Elastic Modulus (GPa)	350-400	300-350	200-250	420-470	440-690
*Fracture Toughness (MPam¹/²)**	3-4	2.8-3.3	10-11	3.5-3.6	2.6
*Thermal Conductivity (W/mK)**	28-32	180-200	2-3	160-200	40
Thermal Shock Resistance	200-280°C	Excellent	300°C	Excellent	800°C
Dielectric Constant (1MHz)	9.8	8.5-9	30-33	Conductive	9.3
*Volume Resistivity (Ωcm)**	>10¹⁴	>10¹⁴	Adjustable	Varies	>10¹⁴

Key Material Advantages

Alumina (Al₂O₃)

Excellent chemical stability and corrosion resistance
High hardness and wear resistance
Ideal for wear components, insulating substrates, corrosion-resistant containers

Aluminum Nitride (AlN)

Superior thermal conductivity for heat dissipation
Excellent electrical insulation properties
Perfect for electronic heat sinks, high-power device packaging

Zirconia (ZrO₂)

Exceptional fracture toughness
Transformation toughening mechanism
Suitable for cutting tools, oxygen sensors, fuel cells

Silicon Carbide (SiC)

Extreme hardness and thermal conductivity
Excellent for ballistic armor, high-temperature bearings, semiconductor components

Sapphire (Single Crystal Al₂O₃)

Optical transparency combined with high hardness
Superior thermal shock resistance
Ideal for specialized optical and extreme environment applications

Performance Features

Superior Corrosion Resistance: Withstands aggressive chemical environments in semiconductor processing
Minimal Particle Generation: Engineered surfaces reduce contamination in cleanroom environments
Customizable Surface Properties: Tailored roughness and finishing to meet specific process requirements
Thermal Stability: Maintains dimensional integrity under rapid thermal cycling
Electrical Insulation: Excellent dielectric properties for plasma applications

Applications

Semiconductor Processing: HDPCVD chambers, etch components, plasma environments
Electronic Packaging: Heat spreaders, insulating substrates
Industrial Components: Wear-resistant parts, corrosion-resistant containers
Advanced Research: Specialized laboratory equipment, optical components

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Contact Person: Ms. Yuki

Tel: 8615517781293

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High-Corrosion Resistance Silicon Carbide Ceramic Components for Semiconductor Applications in 200mm/300mm HDPCVD Domes

Silicon Carbide Ceramic

Reaction Bonded Silicon Carbide

Heating Elements

Silicon Nitride Ceramic

Aluminum Oxide Ceramic

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Ceramic Powder

High-Corrosion Resistance Silicon Carbide Ceramic Components for Semiconductor Applications in 200mm/300mm HDPCVD Domes

High-Corrosion Resistance Silicon Carbide Ceramic Components for Semiconductor Applications in 200mm/300mm HDPCVD Domes

High-Corrosion Resistance Silicon Carbide Ceramic Components

Semiconductor Applications HDPCVD Dome

200mm/300mm Configurations Industrial Ceramic Parts

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